Detection device i.e. electrolyte insulator semiconductor FET type detection device, for sensor to detect e.g. DNA strands in electrolytic solution, has dielectric matrix whose face has detection zone arranged in contact with solution

Dispositif pour la detection d’especes chimiques ou biologiques et procede de fabrication d’un tel dispositif

Abstract

L'invention concerne un dispositif pour la détection d'espèces chimiques ou biologiques de type EISFET dans lequel la zone de drain (16), la zone de source (17) et le canal (18) sont totalement encapsulé dans une matrice (19) réalisée dans un matériau diélectrique. La matrice (19) comporte une face de détection située au-dessus du canal et destinée à venir en contact avec une solution électrolytique polarisée par une électrode. L'invention concerne également un capteur comportant un tel dispositif, ainsi qu'un procédé de fabrication d'un tel dispositif et d'un tel capteur.
The device (15) has a dielectric matrix (19) completely encapsulating an assembly formed by a drain zone (16), a source zone (17) and a channel (18) connecting the zones. The matrix comprises a detection face (20) arranged parallel to the channel. The face comprises a detection zone that is arranged in contact with electrolytic solution containing chemical or biological species to be detected. The matrix is provided with an assembling face (21) that is arranged opposite the detection face. The drain and source zones are partially covered with silicide. Independent claims are also included for the following: (1) a chemical or biological species sensor comprising a detection device (2) a method for manufacturing a detection device (3) a method for manufacturing a chemical or biological species sensor.

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